Invention Grant
- Patent Title: Nanostructures for optical devices
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Application No.: US16601006Application Date: 2019-10-14
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Publication No.: US11487139B2Publication Date: 2022-11-01
- Inventor: Tapashree Roy , Wayne McMillan , Rutger Meyer Timmerman Thijssen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G02F1/01
- IPC: G02F1/01 ; B82Y20/00

Abstract:
Embodiments of metasurfaces having nanostructures with desired geometric profiles and configurations are provided in the present disclosure. In one embodiment, a metasurface includes a nanostructure formed on a substrate, wherein the nanostructure is cuboidal or cylindrical in shape. In another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein each of the nanostructures has a gap greater than 35 nm spaced apart from each other. In yet another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein the nanostructures are fabricated from at least one of TiO2, silicon nitride, or amorphous silicon, or GaN or aluminum zinc oxide or any material with refractive index greater than 1.8, and absorption coefficient smaller than 0.001, the substrate is transparent with absorption coefficient smaller than 0.001.
Public/Granted literature
- US20200166783A1 NANOSTRUCTURES FOR OPTICAL DEVICES Public/Granted day:2020-05-28
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