Invention Grant
- Patent Title: Memory device having staircase structure including word line tiers and formation method thereof
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Application No.: US16901786Application Date: 2020-06-15
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Publication No.: US11488973B2Publication Date: 2022-11-01
- Inventor: Jin Yong Oh
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Wuhan
- Agency: Anova Law Group, PLLC
- Main IPC: H01L27/11575
- IPC: H01L27/11575 ; H01L27/11573 ; H01L27/11582

Abstract:
Memory device and formation method are provided. The memory device includes a substrate; a staircase structure on the substrate; a string driver structure over the staircase structure on a side opposite to the substrate; and a metal routing structure, between the string driver structure and the staircase structure along a vertical direction with respect to a lateral surface of the substrate. The staircase structure includes a plurality of word line tiers. The string driver structure includes a plurality of transistors to individually address the plurality of word line tiers. The string driver structure and the metal routing structure are vertically aligned with the staircase structure based on a lateral central region of the staircase structure.
Public/Granted literature
- US20210366923A1 MEMORY DEVICE AND FORMATION METHOD THEREOF Public/Granted day:2021-11-25
Information query
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