Invention Grant
- Patent Title: Apparatus for aligning head module and system for treating substrate with the apparatus
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Application No.: US17337966Application Date: 2021-06-03
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Publication No.: US11491781B2Publication Date: 2022-11-08
- Inventor: Su Beom Jeon
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: RatnerPrestia
- Priority: KR10-2020-0070702 20200611
- Main IPC: B41J2/04
- IPC: B41J2/04 ; B41J2/045 ; B41J2/145

Abstract:
A head alignment apparatus for determining a reference position using position synchronization and aligning a plurality of head modules according to the reference position, and a substrate treating system including the same are provided. The head alignment apparatus may include, a reference position determining unit for determining a first reference position of a head transfer, in which a plurality of inkjet head modules are installed; and a mounting position determining unit for determining a second reference position of the inkjet head module based on the first reference position so that the inkjet head module can be moved from a current position to a second reference position, wherein the reference position determining unit determines a first reference position using a first image sensor installed on the same plane as the inkjet head module and a second image sensor installed facing the inkjet head module.
Public/Granted literature
- US20210387450A1 APPARATUS FOR ALIGNING HEAD MODULE AND SYSTEM FOR TREATING SUBSTRATE WITH THE APPARATUS Public/Granted day:2021-12-16
Information query
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