Invention Grant
- Patent Title: Polishing composition and polishing method
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Application No.: US17030855Application Date: 2020-09-24
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Publication No.: US11492512B2Publication Date: 2022-11-08
- Inventor: Yukinobu Yoshizaki , Ayano Yamazaki
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-175307 20190926,JPJP2020-030986 20200226
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H05K3/26

Abstract:
To provide a polishing composition suitable for the use of polishing a polishing object having a film containing a silicon material having a silicon-silicon bond formed on a pattern containing an insulating film by a CMP method to form circuit patterns containing the silicon material and capable of also suppressing a remarkable reduction in polishing removal rate.
A polishing composition of this invention contains abrasives, a first water-soluble polymer containing a polymer compound containing a lactam ring and having a weight average molecular weight of less than 300,000, a second water-soluble polymer containing a polymer compound containing a lactam ring and having a weight average molecular weight smaller than that of the first water-soluble polymer, a basic compound, and water.
A polishing composition of this invention contains abrasives, a first water-soluble polymer containing a polymer compound containing a lactam ring and having a weight average molecular weight of less than 300,000, a second water-soluble polymer containing a polymer compound containing a lactam ring and having a weight average molecular weight smaller than that of the first water-soluble polymer, a basic compound, and water.
Public/Granted literature
- US20210095161A1 POLISHING COMPOSITION AND POLISHING METHOD Public/Granted day:2021-04-01
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