Invention Grant
- Patent Title: Dispersion liquid of silica particles, polishing composition, and method for producing dispersion liquid of silica particles
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Application No.: US17040779Application Date: 2019-03-28
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Publication No.: US11492513B2Publication Date: 2022-11-08
- Inventor: Miki Egami , Mitsuaki Kumazawa , Ryo Muraguchi , Michio Komatsu
- Applicant: JGC CATALYSTS AND CHEMICALS LTD.
- Applicant Address: JP Kanagawa
- Assignee: JGC CATALYSTS AND CHEMICALS LTD.
- Current Assignee: JGC CATALYSTS AND CHEMICALS LTD.
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2018-070294 20180330
- International Application: PCT/JP2019/013678 WO 20190328
- International Announcement: WO2019/189610 WO 20191003
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09K3/14 ; C01B33/141 ; H01L21/321 ; H01L21/768

Abstract:
A polishing composition that can not only achieve high polishing speed, but also can improve the surface smoothness (surface quality) of a polished substrate and reduce defects is provided. That is, provided is a polishing composition comprising silica particles and a water soluble polymer, wherein the contained silica particles satisfy the following requirements (a) to (c): (a) the primary particle diameter based on the specific surface area is 5 to 300 nm; (b) the coefficient of variation in the particle diameter is 10% or less; and (c) the Sears number Y is 10.0 to 12.0.
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