- Patent Title: Isolator apparatus and methods for substrate processing chambers
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Application No.: US16896982Application Date: 2020-06-09
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Publication No.: US11492705B2Publication Date: 2022-11-08
- Inventor: Nitin Pathak , Amit Kumar Bansal , Tuan Anh Nguyen , Thomas Rubio , Badri N. Ramamurthi , Juan Carlos Rocha-Alvarez
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Priority: IN201941026844 20190704
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/455 ; C23C16/44

Abstract:
Aspects of the present disclosure relate generally to isolator devices, components thereof, and methods associated therewith for substrate processing chambers. In one implementation, a substrate processing chamber includes an isolator ring disposed between a pedestal and a pumping liner. The isolator ring includes a first surface that faces the pedestal, the first surface being disposed at a gap from an outer circumferential surface of the pedestal. The isolator ring also includes a second surface that faces the pumping liner and a protrusion that protrudes from the first surface of the isolator ring and towards the outer circumferential surface of the pedestal. The protrusion defines a necked portion of the gap between the pedestal and the isolator ring.
Public/Granted literature
- US20210002763A1 ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS Public/Granted day:2021-01-07
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