- Patent Title: Three-dimensional shape measuring apparatus, three-dimensional shape measuring method, three-dimensional shape measuring computer-readable storage medium, and three-dimensional shape measuring computer-readable storage device
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Application No.: US16918100Application Date: 2020-07-01
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Publication No.: US11493331B2Publication Date: 2022-11-08
- Inventor: Takuya Karube , Masaki Fujiwara
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JPJP2019-144967 20190806
- Main IPC: G01B11/25
- IPC: G01B11/25 ; G02B26/08

Abstract:
A three-dimensional shape measuring apparatus includes a stage that includes a translation stage part having a placement surface on which a measurement object is placed and capable of translating the placement surface; an illuminator that includes independently controllable and two-dimensionally-arranged projection devices, and illuminates the measurement object, which is placed on the stage, with measuring light having a predetermined projection pattern having alternating light-and-dark intervals; a photoreceptor that receives measuring light reflected by the measurement object illuminated by the illuminator, and to generate a projection pattern image; and a movement controller that controls the translational movement of the translation stage part by a moving pitch smaller than the minimum width of the projection pattern which can be projected on the stage by independently controlling the projection devices of the illuminator.
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