Invention Grant
- Patent Title: Single proof mass based three-axis accelerometer
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Application No.: US17469917Application Date: 2021-09-09
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Publication No.: US11493533B2Publication Date: 2022-11-08
- Inventor: Leyue Jiang , Yang Zhao
- Applicant: MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Applicant Address: CN Tianjin
- Assignee: MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Current Assignee: MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Current Assignee Address: CN Tianjin
- Agency: EcoTech Law Group, P.C.
- Priority: CN201911054180.0 20191031
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08 ; G01P15/13

Abstract:
The present invention discloses a three-axis accelerometer. The three-axis accelerometer comprises: a substrate; at least one anchor block fixedly disposed on the substrate; a first X-axis electrode, a second X-axis electrode, a first Y-axis electrode, a second Y-axis electrode, a first Z-axis electrode and a second Z-axis electrode all fixedly disposed on the substrate; a framework suspended above the substrate and comprising a first beam column, a second beam column disposed opposite to the first beam column and at least one connecting beam connecting the first beam column and the second beam column; a proof mass suspended above the substrate; and at least one elastic connection component configured to elastically connect to the at least anchor block, the connecting beam, and the proof mass. The three-axis accelerometer can realize high-precision acceleration detection on three axes with only one proof mass, and in particular, can provide a fully differential detection signal for the Z axis, thereby greatly improving detection precision.
Public/Granted literature
- US20210405084A1 SINGLE PROOF MASS BASED THREE-AXIS ACCELEROMETER Public/Granted day:2021-12-30
Information query
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