Invention Grant
- Patent Title: MEMS device with integrated mirror position sensor
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Application No.: US16728874Application Date: 2019-12-27
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Publication No.: US11493609B2Publication Date: 2022-11-08
- Inventor: Youmin Wang
- Applicant: Beijing Voyager Technology Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: Beijing Voyager Technology Co., Ltd.
- Current Assignee: Beijing Voyager Technology Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G01S7/481 ; G02B26/10

Abstract:
Methods and systems for using a dual sided MEMS mirror for determining a direction of a LiDAR beam are disclosed. In one example a MEMS package includes a dual sided MEMS mirror that is manipulable about two orthogonal axes. A first surface of the MEMS mirror is used to steer a LiDAR beam that is used to perform LiDAR imaging of an area of interest. As the mirror is moved, a second surface of the mirror reflects a sensing beam onto a position sensitive device. Data from the position sensitive device is used to determine a position of the mirror which can be used to determine a direction of the steered LiDAR beam.
Public/Granted literature
- US20200278428A1 MEMS DEVICE WITH INTEGRATED MIRROR POSITION SENSOR Public/Granted day:2020-09-03
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