Invention Grant
- Patent Title: Tuning threshold voltage in nanosheet transitor devices
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Application No.: US16819632Application Date: 2020-03-16
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Publication No.: US11502168B2Publication Date: 2022-11-15
- Inventor: Chung-Wei Hsu , Hou-Yu Chen , Chih-Hao Wang , Ching-Wei Tsai , Kuo-Cheng Chiang , Kuan-Lun Cheng , Mao-Lin Huang , Jia-Ni Yu , Lung-Kun Chu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/088 ; H01L29/10 ; H01L29/423 ; H01L29/08 ; H01L29/49 ; H01L21/8234 ; H01L21/285 ; H01L21/311 ; H01L21/28

Abstract:
In some embodiments, the present disclosure relates to an integrated chip that includes a first nanosheet field effect transistor (NSFET). The first NSFET includes a first nanosheet channel structure arranged over a substrate, a second nanosheet channel structure arranged directly over the first nanosheet channel structure, and a first gate electrode structure. The first and second nanosheet channel structures extend in parallel between first and second source/drain regions. The first gate electrode structure includes a first conductive ring and a second conductive ring that completely surround outer sidewalls of the first nanosheet channel structure and the second nanosheet channel structure, respectively, and that comprise a first material. The first gate electrode structure also includes a passivation layer that completely surrounds the first and second conductive rings, is arranged directly between the first and second nanosheet channel structures, and comprises a second material different than the first material.
Public/Granted literature
- US20210134950A1 TUNING THRESHOLD VOLTAGE IN NANOSHEET TRANSITOR DEVICES Public/Granted day:2021-05-06
Information query
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