Invention Grant
- Patent Title: Plasma processing apparatus and electrode consumption amount measuring method
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Application No.: US17108154Application Date: 2020-12-01
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Publication No.: US11508555B2Publication Date: 2022-11-22
- Inventor: Koji Kawamura
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2019-217708 20191202
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46 ; H01L21/311

Abstract:
A plasma processing apparatus 100 is equipped with a shower head 16 and a placing table 2 facing each other. A first RF power supply 10a is configured to apply a RF power to any one of the shower head 16 or the placing table 2 without igniting plasma. A measuring device 204 is configured to measure a physical quantity of the RF power applied by the first RF power supply 10a. A process controller 91 is configured to acquire an inter-electrode distance by using the measured physical quantity of the RF power in a correlation function of the inter-electrode distance and the physical quantity of the RF power.
Public/Granted literature
- US20210166916A1 PLASMA PROCESSING APPARATUS AND ELECTRODE CONSUMPTION AMOUNT MEASURING METHOD Public/Granted day:2021-06-03
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