Invention Grant
- Patent Title: Substrate container system
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Application No.: US16872392Application Date: 2020-05-12
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Publication No.: US11508594B2Publication Date: 2022-11-22
- Inventor: Ming-Chien Chiu , Chih-Ming Lin , Cheng-En Chung , Nien-Yun Yu , Po-Ting Lee
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD
- Applicant Address: TW New Taipei
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
- Current Assignee Address: TW New Taipei
- Agency: ScienBiziP, P.C.
- Priority: TW108124813 20190713
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; H01L21/67

Abstract:
A substrate container system comprises a container body having a bottom face, a front opening that enables passage of a substrate, and a back opening opposing the front opening, the back opening having a width smaller than that of the front opening; and a back cover that covers the back opening and establishes sealing engagement with the container body, wherein the back cover comprises a first gas inlet structure that bendingly extends under the bottom face of the container body upon assembly; wherein the first gas inlet structure comprises a downward facing gas intake port opposing the bottom face of the container body.
Public/Granted literature
- US20210013076A1 SUBSTRATE CONTAINER SYSTEM Public/Granted day:2021-01-14
Information query
IPC分类: