Invention Grant
- Patent Title: Bonding apparatus including a heater and a cooling flow path used for stacking a plurality of semiconductor chips
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Application No.: US16087087Application Date: 2017-03-24
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Publication No.: US11508688B2Publication Date: 2022-11-22
- Inventor: Kohei Seyama , Yuji Eguchi , Shoji Wada
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JPJP2016-059364 20160324
- International Application: PCT/JP2017/012077 WO 20170324
- International Announcement: WO2017/164385 WO 20170928
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/52 ; H01L25/065 ; H01L25/10

Abstract:
The present invention has: a heater; and a bonding tool having a lower surface on which a memory chip is adsorbed; and an upper surface attached to the heater, and is provided with a bonding tool which presses the peripheral edge of the memory chip to a solder ball in a first peripheral area of the lower surface and which presses the center of the memory chip (60) to a DAF having a heat resistance temperature lower than that of the solder ball in a first center area. The amount of heat transmitted from the first center area to the center of the memory chip is smaller than that transmitted from the first peripheral area (A) to the peripheral edge of the memory chip. Thus, the bonding apparatus in which the center of a bonding member can be heated to a temperature lower than that at the peripheral edge can be provided.
Public/Granted literature
- US20210225799A1 BONDING APPARATUS Public/Granted day:2021-07-22
Information query
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