Invention Grant
- Patent Title: Piezoelectric single crystal silicon carbide microelectromechanical resonators
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Application No.: US16368802Application Date: 2019-03-28
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Publication No.: US11509277B2Publication Date: 2022-11-22
- Inventor: Raviv Perahia , Logan D. Sorenson , Lian X. Huang , Jeremy Bregman
- Applicant: HRL Laboratories, LLC
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry, LLP
- Main IPC: H03H3/02
- IPC: H03H3/02 ; H03H9/205 ; H03H9/02 ; H03H9/05 ; H03H9/13 ; H03H9/17 ; H03H9/15

Abstract:
A resonator has a resonator body and a frame at least partially surrounding the resonator body, the resonator body being coupled to the frame by at least one tether. The resonator body, frame and at least one tether comprise silicon carbide. A plurality of interdigitated electrodes are disposed on the silicon carbide resonator body. The resonator body preferably comprises 6H silicon carbide and preferably has a crystalline c-axis oriented generally parallel to a thickness direction of the resonator body.
Public/Granted literature
- US20190305749A1 PIEZOELECTRIC SINGLE CRYSTAL SILICON CARBIDE MICROELECTROMECHANICAL RESONATORS Public/Granted day:2019-10-03
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