Invention Grant
- Patent Title: Acoustic wave device and radio-frequency front-end circuit
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Application No.: US16436964Application Date: 2019-06-11
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Publication No.: US11509284B2Publication Date: 2022-11-22
- Inventor: Hideki Iwamoto
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2018-115466 20180618
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/08 ; H01Q1/22

Abstract:
An acoustic wave device includes a piezoelectric layer, an IDT electrode, a high-acoustic-velocity support substrate, and a low-acoustic-velocity film. The high-acoustic-velocity support substrate is located on an opposite side of the piezoelectric layer from the IDT electrode in the thickness direction of the piezoelectric layer. The low-acoustic-velocity film is disposed between the high-acoustic-velocity support substrate and the piezoelectric layer in the thickness direction. The high-acoustic-velocity support substrate includes a base region and a surface region disposed nearer to the low-acoustic-velocity film than the base region in the thickness direction and whose crystal quality is worse than that of the base region. The surface region includes first and second layers disposed nearer to the base region than the first layer in the thickness direction and whose crystal quality is better than that of the first layer.
Public/Granted literature
- US20190386639A1 ACOUSTIC WAVE DEVICE AND RADIO-FREQUENCY FRONT-END CIRCUIT Public/Granted day:2019-12-19
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