Invention Grant
- Patent Title: Package substrate and manufacturing method thereof
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Application No.: US17026793Application Date: 2020-09-21
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Publication No.: US11515258B2Publication Date: 2022-11-29
- Inventor: Xianming Chen , Yejie Hong , Benxia Huang , Lei Feng
- Applicant: Zhuhai ACCESS Semiconductor Co., Ltd
- Applicant Address: CN Zhuhai
- Assignee: Zhuhai ACCESS Semiconductor Co., Ltd
- Current Assignee: Zhuhai ACCESS Semiconductor Co., Ltd
- Current Assignee Address: CN Zhuhai
- Agency: The Dobrusin Law Firm, P.C.
- Priority: CN202010667146.7 20200713
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L21/50 ; H01L21/768 ; H01L23/15 ; H01L23/00 ; H01L21/60

Abstract:
A method for manufacturing a package substrate, includes: providing a glass frame having a through hole and a chip embedding cavity; fixing an electronic component in the chip embedding cavity; coating a dielectric layer to an upper surface of the glass frame, the through hole and the chip embedding cavity and curing the dielectric layer; photoetching the dielectric layer to form an opening window arranged above the through hole; depositing metal through the opening window and patterning the metal to form a metal pillar and a circuit layer, the metal pillar passing through the through hole, the circuit layer being arranged on the upper surface and/or a lower surface of the glass frame and being connected to the electronic component and the metal pillar; forming a solder mask on a surface of the circuit layer, patterning the solder mask to form a pad connected to the circuit layer.
Public/Granted literature
- US20220013462A1 PACKAGE SUBSTRATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-01-13
Information query
IPC分类: