Invention Grant
- Patent Title: Method for processing a semiconductor wafer, semiconductor composite structure and support structure for semiconductor wafer
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Application No.: US16421707Application Date: 2019-05-24
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Publication No.: US11515264B2Publication Date: 2022-11-29
- Inventor: Francisco Javier Santos Rodriguez , Alexander Breymesser , Erich Griebl , Michael Knabl , Matthias Kuenle , Andreas Moser , Roland Rupp , Hans-Joachim Schulze , Sokratis Sgouridis , Stephan Voss
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102018112603.4 20180525
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/16

Abstract:
A method for processing a semiconductor wafer is proposed. The method may include reducing a thickness of the semiconductor wafer. A carrier structure is placed on a first side of the semiconductor wafer, e.g. before or after reducing the thickness of the semiconductor wafer. The method further includes providing a support structure on a second side of the semiconductor wafer opposite to the first side, e.g. after reducing the thickness of the semiconductor wafer. Methods for welding a support structure onto a semiconductor wafer are proposed. Further, semiconductor composite structures with support structures welded onto a semiconductor wafer are proposed.
Information query
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