Invention Grant
- Patent Title: Semiconductor device with asymmetric gate structure
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Application No.: US17064630Application Date: 2020-10-07
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Publication No.: US11515409B2Publication Date: 2022-11-29
- Inventor: Hang Liao , Qiyue Zhao , Chang An Li , Chao Wang , Chunhua Zhou , King Yuen Wong
- Applicant: INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.
- Applicant Address: CN Zhuhai
- Assignee: INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.
- Current Assignee: INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Zhuhai
- Agency: Idea Intellectual Limited
- Agent Margaret A. Burke; Sam T. Yip
- Priority: CN202010564674.X 20200619
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/778 ; H01L29/20 ; H01L29/40

Abstract:
The present invention relates to a semiconductor device with an asymmetric gate structure. The device comprises a substrate; a channel layer, positioned above the substrate; a barrier layer, positioned above the channel layer, the barrier layer and the channel layer being configured to form two-dimensional electron gas (2DEG), and the 2DEG being formed in the channel layer along an interface between the channel layer and the barrier layer; a source contact and a drain contact, positioned above the barrier layer; a doped group III-V layer, positioned above the barrier layer and between the drain contact and the source contact; and a gate electrode, positioned above the doped group III-V layer and configured to form a Schottky junction with the doped group III-V layer, wherein the doped group III-V layer and/or gate electrode has a non-central symmetrical geometry so as to achieve the effect of improving gate leakage current characteristics.
Public/Granted literature
- US20210399124A1 SEMICONDUCTOR DEVICE WITH ASYMMETRIC GATE STRUCTURE Public/Granted day:2021-12-23
Information query
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