Invention Grant
- Patent Title: Ferroelectric semiconductor device and method of manufacturing the same
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Application No.: US16228795Application Date: 2018-12-21
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Publication No.: US11515419B2Publication Date: 2022-11-29
- Inventor: Hyangkeun Yoo
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2018-0053957 20180510
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/51 ; H01L29/66 ; H01L29/08 ; H01L27/11585

Abstract:
A ferroelectric semiconductor device of the present disclosure includes a substrate having a channel structure, a trench pattern having a bottom surface and a sidewall surface in the channel structure, a dielectric layer disposed on the bottom surface and the sidewall surface of the trench pattern, and a gate electrode layer disposed on the dielectric layer. The dielectric layer includes a ferroelectric layer pattern and a non-ferroelectric layer pattern that are disposed along the sidewall surface of the trench pattern.
Information query
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