Invention Grant
- Patent Title: Integrated structure of mems microphone and air pressure sensor and fabrication method thereof
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Application No.: US17043349Application Date: 2018-09-27
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Publication No.: US11516595B2Publication Date: 2022-11-29
- Inventor: Dexin Wang , Huabin Fang , Qinglin Song
- Applicant: WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
- Applicant Address: CN Shandong
- Assignee: WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
- Current Assignee: WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
- Current Assignee Address: CN Shandong
- Agency: Paratus Law Group. PLLC
- Priority: CN201810549621.3 20180531
- International Application: PCT/CN2018/107866 WO 20180927
- International Announcement: WO2019/227805 WO 20191205
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H04R19/04 ; B81B7/02 ; B81C1/00 ; H04R31/00

Abstract:
An integrated structure of a MEMS microphone and an air pressure sensor, and a fabrication method for the integrated structure, the structure including a base substrate; a vibrating membrane, back electrode, upper electrode, and lower electrode formed on the base substrate, as well as a sacrificial layer formed between the vibrating membrane and the back electrode and between the upper electrode and the lower electrode; a first integrated circuit electrically connected to the vibrating membrane and the back electrode respectively; and a second integrated circuit electrically connected to the lower electrode and the upper electrode respectively, wherein a region of the base substrate corresponding to the vibrating membrane is provided with a back cavity; the sacrificial layer between the vibrating membrane and the back electrode is hollowed out to from a vibrating space that communicates with the exterior of the integrated structure, and the sacrificial layer between the upper electrode and the lower electrode is hollowed out to form a closed space; and the integrated circuits are formed on a chip, thereby reducing the interference of connection lines on the performance of a microphone, reducing the introduction of noise, reducing the size of a product and reducing power consumption.
Public/Granted literature
- US20210021937A1 INTEGRATED STRUCTURE OF MEMS MICROPHONE AND AIR PRESSURE SENSOR AND FABRICATION METHOD THEREOF Public/Granted day:2021-01-21
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