Invention Grant
- Patent Title: Ozonated water delivery system and method of use
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Application No.: US16553033Application Date: 2019-08-27
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Publication No.: US11518696B2Publication Date: 2022-12-06
- Inventor: Heinrich Johannes Seiwert , Christiane Le Tiec , Ulrich Alfred Brammer
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agent Brian F. Swienton
- Main IPC: C02F1/68
- IPC: C02F1/68 ; A61L2/18

Abstract:
The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit may be in communication with the contacting device.
Public/Granted literature
- US20200071208A1 Ozonated Water Delivery System and Method of Use Public/Granted day:2020-03-05
Information query