Invention Grant
- Patent Title: Fluid composition and method for conducting a material removing operation
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Application No.: US17004988Application Date: 2020-08-27
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Publication No.: US11518913B2Publication Date: 2022-12-06
- Inventor: Lin Fu , Jason A. Sherlock , Long Huy Bui , Douglas E. Ward
- Applicant: SAINT-GOBAIN CERAMICS & PLASTICS, INC.
- Applicant Address: US MA Worcester
- Assignee: SAINT-GOBAIN CERAMICS & PLASTICS, INC.
- Current Assignee: SAINT-GOBAIN CERAMICS & PLASTICS, INC.
- Current Assignee Address: US MA Worcester
- Agency: Abel Schillinger, LLP
- Agent Adrian Lawrence
- Main IPC: C09G1/18
- IPC: C09G1/18 ; C23F3/04 ; C01B35/12
Abstract:
A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid composition can be essentially free of abrasive particles and may achieve a high material removal rate and excellent surface finish.
Public/Granted literature
- US20210062045A1 FLUID COMPOSITION AND METHOD FOR CONDUCTING A MATERIAL REMOVING OPERATION Public/Granted day:2021-03-04
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