Invention Grant
- Patent Title: Plating method and recording medium
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Application No.: US16914652Application Date: 2020-06-29
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Publication No.: US11519074B2Publication Date: 2022-12-06
- Inventor: Kazutoshi Iwai , Nobutaka Mizutani , Yuichiro Inatomi , Takashi Tanaka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2016-077255 20160407
- Main IPC: C23C18/34
- IPC: C23C18/34 ; C23C18/16

Abstract:
A plating apparatus, a plating method and a recording medium can allow a temperature of a wafer to be uniform within a surface thereof. A plating apparatus 1 includes a substrate holding unit 52 configured to hold a substrate W; a plating liquid supply unit 53 configured to supply a plating liquid M1 to the substrate W; and a solvent supply unit 55a configured to supply a solvent N1 having a different temperature from a temperature of the plating liquid M1 to the substrate W. The solvent N1 is supplied to a preset position on the substrate W from the solvent supply unit 55a after the plating liquid M1 is supplied to the substrate W from the plating liquid supply unit 53.
Public/Granted literature
- US20200325581A1 PLATING METHOD AND RECORDING MEDIUM Public/Granted day:2020-10-15
Information query
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