Invention Grant
- Patent Title: Modular vacuum pumping and/or abatement system
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Application No.: US16763519Application Date: 2018-11-05
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Publication No.: US11519401B2Publication Date: 2022-12-06
- Inventor: Christopher Mark Bailey , Craig Leonard Sands
- Applicant: Edwards Limited
- Applicant Address: GB Burgess Hill
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Burgess Hill
- Agency: Shumaker & Sieffert, P.A.
- Priority: GB1718752 20171113,GB1804937 20180327
- International Application: PCT/GB2018/053211 WO 20181105
- International Announcement: WO2019/092409 WO 20190516
- Main IPC: F04B23/04
- IPC: F04B23/04 ; F04B41/06 ; F04B49/00 ; F04C27/00 ; F04C23/00 ; B01D53/00 ; F04B39/12 ; F04B37/14 ; F04B39/14 ; F04C25/02 ; F04B41/00 ; F16L51/04 ; F16L53/35 ; F16L23/08 ; C23C16/44

Abstract:
A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.
Public/Granted literature
- US20200340467A1 MODULAR VACUUM PUMPING AND/OR ABATEMENT SYSTEM Public/Granted day:2020-10-29
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