Invention Grant
- Patent Title: Method for manufacturing micromechanical diaphragm sensors
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Application No.: US16626097Application Date: 2018-06-14
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Publication No.: US11519803B2Publication Date: 2022-12-06
- Inventor: Arne Dannenberg , Stephan Oppl
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017210691.3 20170626
- International Application: PCT/EP2018/065775 WO 20180614
- International Announcement: WO2019/001974 WO 20190103
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G01L13/02 ; B81B7/00

Abstract:
A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel.
Public/Granted literature
- US20200209089A1 METHOD FOR MANUFACTURING MICROMECHANICAL DIAPHRAGM SENSORS Public/Granted day:2020-07-02
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