Invention Grant
- Patent Title: Vacuum gauge
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Application No.: US17178621Application Date: 2021-02-18
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Publication No.: US11519805B2Publication Date: 2022-12-06
- Inventor: Junya Nakai , Sotaro Kishida
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2020-037515 20200305
- Main IPC: G01L19/04
- IPC: G01L19/04 ; G01L21/00

Abstract:
In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.
Public/Granted literature
- US20210278303A1 VACUUM GAUGE Public/Granted day:2021-09-09
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