Invention Grant
- Patent Title: Photoacoustic gas sensor and pressure sensor
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Application No.: US16905295Application Date: 2020-06-18
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Publication No.: US11519848B2Publication Date: 2022-12-06
- Inventor: Johannes Manz , Christoph Glacer , David Tumpold
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: EP19181350 20190619
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L13/02 ; G01N33/00 ; G01N21/17 ; G01N29/24
Abstract:
A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.
Information query
