The present invention relates to a method of calibrating a humidity sensor device, comprising the steps determining a first dew point and a first relative humidity at a first temperature in an environment by the humidity sensor device using a first calibration offset; subsequently heating the humidity sensor device, in particular, by self-heating, thereby heating the environment to a second temperature higher than the first temperature; subsequently determining a second dew point at the second temperature by the humidity sensor device; subsequently determining whether the determined second dew point differs from the determined first dew point by more than a predetermined difference; and subsequently changing the first calibration offset of the humidity sensor device by a predetermined value to obtain a second calibration offset, if it is determined that the determined second dew point differs from the determined first dew point by more than the predetermined difference.