Invention Grant
- Patent Title: Humidity sensor
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Application No.: US17406786Application Date: 2021-08-19
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Publication No.: US11519874B2Publication Date: 2022-12-06
- Inventor: Woo Seok Yang , Sunghoon Hong , Gyu Ri Lim
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2020-0106167 20200824,KR10-2021-0005090 20210114
- Main IPC: G01N27/22
- IPC: G01N27/22

Abstract:
A humidity sensor is provided. The humidity sensor includes a flexible substrate, a moisture absorption prevention layer covering the flexible substrate, a dielectric layer on the moisture absorption prevention layer, hydrophobic patterns on the dielectric layer, a first electrode between the moisture absorption prevention layer and the dielectric layer, and a second electrode spaced apart from the first electrode between the moisture absorption prevention layer and the dielectric layer. The first electrode has a thickness greater than that of the moisture absorption prevention layer.
Public/Granted literature
- US20220057354A1 HUMIDITY SENSOR Public/Granted day:2022-02-24
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