Invention Grant
- Patent Title: Physical quantity sensor, electronic apparatus, and vehicle
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Application No.: US16521927Application Date: 2019-07-25
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Publication No.: US11519933B2Publication Date: 2022-12-06
- Inventor: Kazuyuki Nagata
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JPJP2018-140030 20180726
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B60R16/023

Abstract:
An acceleration sensor as a physical quantity sensor includes: a substrate; a correction electrode fixed to the substrate; a detection electrode fixed to the substrate; and a moving member fixed to the substrate. The moving member has: a base part; a first anchor part fixed to the substrate; a first finger electrode extending from the base part and facing the correction electrode; a mass part provided in such a way as to be displaceable in a direction of detection of a physical quantity in relation to the substrate; and a second finger electrode extending from the mass part and facing the detection electrode. A distance between a second anchor part where the detection electrode and the substrate are fixed, and the base part, is shorter than a distance between the second anchor part and the mass part.
Public/Granted literature
- US20200033378A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2020-01-30
Information query
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