Invention Grant
- Patent Title: Measuring device and method
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Application No.: US16876078Application Date: 2020-05-17
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Publication No.: US11519948B2Publication Date: 2022-12-06
- Inventor: Daisuke Kawano
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JPJP2019-093550 20190517,JPJP2019-198602 20191031
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01K13/00 ; H01L21/67 ; H01J37/32

Abstract:
A measuring device is provided. The measuring device includes a base substrate, sensor electrodes, a temperature sensor, a high frequency oscillator, C/V conversion circuits for generating voltage signals corresponding to electrostatic capacitances of the sensor electrodes, an A/D converter for converting the voltage signals to digital values, a calculation unit for calculating measurement values indicating the electrostatic capacitances based on the digital values, and phase control circuits connected between the sensor electrodes and the high-frequency oscillator. Each of the conversion circuits includes an operational amplifier, and the high-frequency oscillator is connected to a non-inverting input terminal of the amplifier and is connected to an inverting input terminal thereof through a corresponding phase control circuit. The calculation unit stores parameters for setting admittances of the phase control circuits in association with temperatures and adjusts the admittances of the phase control circuits using a parameter associated with a detected temperature.
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