Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device

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US11520090B2 Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device 有权

Patent Title: Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device
Application No.: US16929543

Application Date: 2020-07-15
Publication No.: US11520090B2

Publication Date: 2022-12-06
Inventor: Takashi Sukegawa
Applicant: CANON KABUSHIKI KAISHA
Applicant Address: JP Tokyo
Assignee: CANON KABUSHIKI KAISHA
Current Assignee: CANON KABUSHIKI KAISHA
Current Assignee Address: JP Tokyo
Agency: Rossi, Kimms & McDowell LLP
Priority: JPJP2019-135679 20190723
Main IPC: G02B5/18
IPC: G02B5/18

$Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device$

Abstract:

A diffraction device includes a ZnS member and a ZnSe member coupled to the ZnS member, and a diffraction grating is provided on the ZnSe member.

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