Invention Grant
- Patent Title: Imprint apparatus and method of manufacturing article
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Application No.: US17113844Application Date: 2020-12-07
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Publication No.: US11520229B2Publication Date: 2022-12-06
- Inventor: Shinichi Shudo
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2019-226804 20191216
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C33/42 ; B29C35/08

Abstract:
An imprint apparatus that performs a supply step of supplying an imprint material onto each of shot regions adjacent to each other on a substrate and, after the supply step, execute an imprint process including a contact step, a curing step, and a mold releasing step for each of the shot regions. The apparatus comprises an irradiator that irradiates the imprint material on the shot region with light in the curing step, and a light-shielding member that defines an irradiation region of the light from the irradiator, wherein the light-shielding member defines the irradiation region such that the imprint material in an end portion of a first shot region on a side of a second shot region adjacent to the first shot region is complementarily cured by light irradiation in the curing step performed on the second shot region.
Public/Granted literature
- US20210181624A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2021-06-17
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