Invention Grant
- Patent Title: Processing liquid supply system, processing liquid supply apparatus, and carrier storage apparatus
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Application No.: US16760480Application Date: 2018-10-31
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Publication No.: US11521854B2Publication Date: 2022-12-06
- Inventor: Kazuya Hashimoto , Hikaru Akada
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Venjuris, P.C.
- Priority: JPJP2017-211984 20171101
- International Application: PCT/JP2018/040567 WO 20181031
- International Announcement: WO2019/088189 WO 20190509
- Main IPC: H01L21/027
- IPC: H01L21/027 ; B05D1/32 ; G03F1/66 ; H01L21/67

Abstract:
A processing liquid supply system includes: a processing liquid supply apparatus including a first carrier accommodation section that accommodates a carrier, a first bottle accommodation section that accommodates a processing liquid bottle taken out from the carrier, a liquid feeding section that feeds a processing liquid to a substrate processing apparatus from the processing liquid bottle, and a first transfer arm; and a control device configured to control the first transfer arm to take a processing liquid bottle out from the carrier and transfer the processing liquid bottle to the first bottle accommodation section, to transfer the processing liquid bottle from the first bottle accommodation section to the liquid feeding section, and to transfer the consumed processing liquid bottle from the liquid feeding arm and accommodate the consumed processing liquid bottle in the carrier.
Information query
IPC分类: