Invention Grant
- Patent Title: Carrier tray
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Application No.: US17168349Application Date: 2021-02-05
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Publication No.: US11521877B2Publication Date: 2022-12-06
- Inventor: Kentaro Iizuka
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2020-026979 20200220
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A carrier tray includes a housing, an ingot accommodating recess that accommodates a semiconductor ingot, and a wafer accommodating recess that accommodates a wafer. The housing has an upper wall, a lower wall, a pair of side walls connecting the upper wall and the lower wall to each other, and a tunnel defined by the upper wall, the lower wall, and the pair of side walls. A plurality of levers each of which has a point of application projecting from a bottom surface of the ingot accommodating recess, a point of action projecting from a side surface of the ingot accommodating recess, and a fulcrum formed between the point of application and the point of action are each attached to the housing so as to be rotatable around the fulcrum.
Public/Granted literature
- US20210265186A1 CARRIER TRAY Public/Granted day:2021-08-26
Information query
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