Invention Grant
- Patent Title: MEMS actuation system
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Application No.: US16584471Application Date: 2019-09-26
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Publication No.: US11522472B2Publication Date: 2022-12-06
- Inventor: Guiqin Wang , Xiaolei Liu
- Applicant: MEMS Drive (Nanjing) Co., Ltd.
- Applicant Address: CN Nanjing
- Assignee: MEMS Drive (Nanjing) Co., Ltd.
- Current Assignee: MEMS Drive (Nanjing) Co., Ltd.
- Current Assignee Address: CN Nanjing
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: H02N2/02
- IPC: H02N2/02 ; H02N1/00 ; G03B13/36 ; G02B7/09 ; G03B5/02 ; G03B5/04 ; G02B27/64 ; G02B13/00

Abstract:
A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator; an optoelectronic device coupled to the in-plane MEMS actuator; and a lens barrel assembly coupled to the out-of-plane MEMS actuator.
Public/Granted literature
- US20200099317A1 MEMS Actuation System Public/Granted day:2020-03-26
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