Invention Grant
- Patent Title: Top electrode via with low contact resistance
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Application No.: US16921133Application Date: 2020-07-06
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Publication No.: US11527713B2Publication Date: 2022-12-13
- Inventor: Bi-Shen Lee , Hai-Dang Trinh , Hsun-Chung Kuang , Tzu-Chung Tsai , Yao-Wen Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode disposed over a lower interconnect within a lower inter-level dielectric (ILD) layer over a substrate. A data storage structure is over the bottom electrode. A first top electrode layer is disposed over the data storage structure, and a second top electrode layer is on the first top electrode layer. The second top electrode layer is less susceptible to oxidation than the first top electrode layer. A top electrode via is over and electrically coupled to the second top electrode layer.
Public/Granted literature
- US20210242399A1 TOP ELECTRODE VIA WITH LOW CONTACT RESISTANCE Public/Granted day:2021-08-05
Information query
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