Invention Grant
- Patent Title: Adaptive control for a power generator
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Application No.: US17232950Application Date: 2021-04-16
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Publication No.: US11531312B2Publication Date: 2022-12-20
- Inventor: David J. Coumou , Yuriy Elner , Aung Toe , Daniel M. Gill , Eldridge M. Mount, IV , Shaun Smith
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G05B19/042
- IPC: G05B19/042 ; H01L21/67 ; H01J37/32

Abstract:
A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
Public/Granted literature
- US20210311448A1 Adaptive Control For A Power Generator Public/Granted day:2021-10-07
Information query
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