Invention Grant
- Patent Title: Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate
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Application No.: US16919788Application Date: 2020-07-02
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Publication No.: US11532491B2Publication Date: 2022-12-20
- Inventor: Hisajiro Nakano , Junji Kunisawa
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JPJP2017-097621 20170516
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; H01L21/677

Abstract:
A substrate cleaning apparatus and related apparatuses/methods are disclosed. In one embodiment, a substrate cleaning apparatus includes: a first spindle group including a first driving spindle having a first driving roller configured to rotate a substrate and an idler spindle having a driven roller rotated by the substrate; a second spindle group including a plurality of second driving spindles each having a second driving roller configured to rotate the substrate; a cleaning mechanism configured to clean the substrate rotated by the first driving roller and the plurality of second driving rollers; and a rotation detector configured to detect the rotational speed of the driven roller. The driven roller is positioned on the opposite side to a direction in which the substrate receives a force from the cleaning mechanism.
Public/Granted literature
- US20200335363A1 SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF CLEANING SUBSTRATE Public/Granted day:2020-10-22
Information query
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