Invention Grant
- Patent Title: Load port with non-contact sensor
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Application No.: US17348816Application Date: 2021-06-16
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Publication No.: US11532496B2Publication Date: 2022-12-20
- Inventor: Kinya Kagami , Seiji Matsuda
- Applicant: HIRATA CORPORATION
- Applicant Address: JP Kumamoto
- Assignee: HIRATA CORPORATION
- Current Assignee: HIRATA CORPORATION
- Current Assignee Address: JP Kumamoto
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JPJP2019-068531 20190329,JPJP2020-039149 20200306
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/687

Abstract:
A load port includes a first pin projecting on a dock plate and provided on the dock plate so as to be pushed down, and a first detection unit provided on the base portion and configured to detect that the dock plate is located at a first position. The first detection unit includes a movable member capable of displacing in a moving direction of the dock plate, and a first sensor configured to detect the displacement of the movable member. The movable member is arranged at a position to abut against the first pin that is in a pushed down state in a process in which the dock plate moves from a second position to the first position.
Public/Granted literature
- US20210313210A1 LOAD PORT Public/Granted day:2021-10-07
Information query
IPC分类: