Invention Grant
- Patent Title: Fringe capacitor arranged based on metal layers with a selected orientation of a preferred direction
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Application No.: US17239884Application Date: 2021-04-26
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Publication No.: US11532546B2Publication Date: 2022-12-20
- Inventor: Viet Thanh Dinh , Bartholomeus Wilhelmus Christiaan Hovens , Marina Vroubel
- Applicant: NXP B.V.
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L49/02 ; H01L27/08

Abstract:
A fringe capacitor comprises a plurality of unidirectional metal layers, wherein an orientation of a preferred direction of each of the unidirectional metal layers is in a same direction. First fingers of the fringe capacitor are formed in a first layer of the unidirectional metal layers, the first fingers being interdigitated and having a direction parallel to the orientation of the preferred direction. Second fingers of the fringe capacitor are formed in a second layer of the unidirectional metal layers, the second fingers being interdigitated and having a direction parallel to the orientation of the preferred direction, the first layer and the second layer separated by at least a layer of not having the orientation of the preferred direction and not having fingers of the fringe capacitor.
Public/Granted literature
- US20220344257A1 FRINGE CAPACITOR ARRANGED BASED ON METAL LAYERS WITH A SELECTED ORIENTATION OF A PREFERRED DIRECTION Public/Granted day:2022-10-27
Information query
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