Invention Grant
- Patent Title: Metal gate modulation to improve kink effect
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Application No.: US17351392Application Date: 2021-06-18
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Publication No.: US11532621B2Publication Date: 2022-12-20
- Inventor: Meng-Han Lin , Te-Hsin Chiu , Wei Cheng Wu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L27/092 ; H01L29/49 ; H01L29/423 ; H01L29/78 ; H01L21/8238 ; H01L29/66 ; H01L21/28 ; H01L21/762 ; H01L29/40 ; H01L29/51

Abstract:
The present disclosure relates to an integrated chip. The integrated chip includes a source region and a drain region disposed within an upper surface of a substrate. One or more dielectric materials are disposed within a trench defined by sidewalls of the substrate that surround the source region and the drain region. The one or more dielectric materials include one or more interior surfaces defining a recess within the one or more dielectric materials. A gate structure is disposed over the substrate between the source region and the drain region. The gate structure includes a first gate material over the upper surface of the substrate and a second gate material. The second gate material completely fills the recess as viewed along a cross-sectional view.
Public/Granted literature
- US20210313325A1 METAL GATE MODULATION TO IMPROVE KINK EFFECT Public/Granted day:2021-10-07
Information query
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