Invention Grant
- Patent Title: Large-scale crossbar arrays with reduced series resistance
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Application No.: US16193398Application Date: 2018-11-16
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Publication No.: US11532786B2Publication Date: 2022-12-20
- Inventor: Ning Ge
- Applicant: TETRAMEM INC.
- Applicant Address: US CA Newark
- Assignee: TETRAMEM INC.
- Current Assignee: TETRAMEM INC.
- Current Assignee Address: US CA Newark
- Agency: Jaffery Watson Mendonsa & Hamilton LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L43/02

Abstract:
Technologies for reducing series resistance are disclosed. An example method may comprise: forming a first layer on a temporary substrate; forming a second layer on the first layer; etching the first layer and the second layer to form a trench; electroplating a top electrode via the trench, wherein the top electrode partially formed on a top surface of the second layer; removing the first layer and the second layer; forming a curable layer on the temporary substrate and the top electrode; removing the temporary substrate from the curable layer and the top electrode; forming a cross-point device on the curable layer and the top electrode; forming a bottom electrode on the cross-point device; and forming a flexible substrate on the bottom electrode.
Public/Granted literature
- US20200161546A1 LARGE-SCALE CROSSBAR ARRAYS WITH REDUCED SERIES RESISTANCE Public/Granted day:2020-05-21
Information query
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