Invention Grant
- Patent Title: Elastic wave device
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Application No.: US16205268Application Date: 2018-11-30
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Publication No.: US11533040B2Publication Date: 2022-12-20
- Inventor: Masayuki Morita , Hideki Iwamoto
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2017-248387 20171225
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/145 ; H03H3/08 ; H03H9/25 ; H03H9/64 ; H01L41/29 ; H01L41/047

Abstract:
An elastic wave device includes a piezoelectric film, a high acoustic velocity member, a low acoustic velocity film located between the piezoelectric film and the high acoustic velocity member and through which an elastic wave propagates at a lower acoustic velocity than an elastic wave that propagates through the piezoelectric film, and an interdigital transducer electrode including electrode fingers separated from each other and disposed side by side in a first direction. At least one of the electrode fingers includes a first metal layer including first and second main body portions. A recessed portion is located in a central region in the first direction of the electrode finger and is recessed in the thickness direction of the piezoelectric film. A protrusion portion protrudes from at least a portion of the first main body portion in the first direction.
Public/Granted literature
- US20190199320A1 ELASTIC WAVE DEVICE Public/Granted day:2019-06-27
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