Invention Grant
- Patent Title: Multi-zone cooling of plasma heated window
-
Application No.: US15814139Application Date: 2017-11-15
-
Publication No.: US11538666B2Publication Date: 2022-12-27
- Inventor: Yiting Zhang , Richard Marsh , Saravanapriyan Sriraman , Alexander Paterson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; F25D1/00 ; F25D17/00

Abstract:
A substrate processing system includes a multi-zone cooling apparatus to provide cooling for all or substantially all of a window in a substrate processing chamber. In one aspect, the apparatus includes one or more plenums to cover all or substantially all of a window in a substrate processing chamber, including under an energy source for transformer coupled plasma in the substrate processing chamber. One or more air amplifiers and accompanying conduits provide air to the one or more plenums to provide air flow to the window. The conduits are connected to plenum inlets at various distances from the center, to direct airflow throughout the window and thus address center hot, middle hot, and edge hot conditions, depending on the processes being carried out in the chamber. In one aspect, the one or more plenums include a central air inlet, to direct air toward the center portion of the window, to address center hot conditions.
Public/Granted literature
- US20190148118A1 Multi-Zone Cooling Of Plasma Heated Window Public/Granted day:2019-05-16
Information query