Invention Grant
- Patent Title: Apparatus for monitoring an exchanging process of a semiconductor part and a method for the same
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Application No.: US17140294Application Date: 2021-01-04
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Publication No.: US11538702B2Publication Date: 2022-12-27
- Inventor: Woo Hyung Choi , Sang Woo Lee
- Applicant: Adaptive Plasma Technology Corp.
- Applicant Address: KR Icheon-si
- Assignee: Adaptive Plasma Technology Corp.
- Current Assignee: Adaptive Plasma Technology Corp.
- Current Assignee Address: KR Icheon-si
- Agency: Cantor Colburn LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; H01L21/67 ; H01L21/687 ; G06T7/73 ; B25J19/00 ; B25J19/02 ; B25J11/00 ; H04N7/18
Abstract:
Provided is an apparatus for monitoring an exchanging process of a semiconductor part and a method for the same. The apparatus comprises finger having a structure capable of loading the part and transferred by a robot for exchanging; and at least one image obtaining means coupled to the finger and obtaining an image of an exchanging position.
Public/Granted literature
- US20220216082A1 APPARATUS FOR MONITORING AN EXCHANGING PROCESS OF A SEMICONDUCTOR PART AND A METHOD FOR THE SAME Public/Granted day:2022-07-07
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