Invention Grant
- Patent Title: Method of transfer printing
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Application No.: US16486695Application Date: 2018-02-17
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Publication No.: US11538709B2Publication Date: 2022-12-27
- Inventor: James G. Fiorenza , Susan L. Feindt , Michael D. Delaus , Matthew Duffy , Ryan Iutzi , Kenneth Flanders , Rama Krishna Kotlanka
- Applicant: Analog Devices International Unlimited Company
- Applicant Address: IE Limerick
- Assignee: Analog Devices International Unlimited Company
- Current Assignee: Analog Devices International Unlimited Company
- Current Assignee Address: IE Limerick
- Agency: Schwegman Lundberg & Woessner, P.A.
- International Application: PCT/IB2018/000203 WO 20180217
- International Announcement: WO2018/150262 WO 20180823
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/482 ; H01L21/683 ; H01L25/075 ; H01L33/00 ; H01L33/32 ; H01L33/62 ; B41F16/00

Abstract:
A transfer printing method is described that can be used for a wide variety of materials, such as to allow for circuits formed of different materials to be integrated together on a single integrated circuit. A tether (18) is formed on dice regions (16) of a first wafer (30), followed by attachment of a second wafer (32) to the tethers. The dice regions (16) are processed so as to be separated, followed by transfer printing of the dice regions to a third wafer (34).
Public/Granted literature
- US20210134641A1 METHOD OF TRANSFER PRINTING Public/Granted day:2021-05-06
Information query
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