Invention Grant
- Patent Title: Interconnect structure
-
Application No.: US17097505Application Date: 2020-11-13
-
Publication No.: US11538749B2Publication Date: 2022-12-27
- Inventor: Shao-Kuan Lee , Hsin-Yen Huang , Cheng-Chin Lee , Kuang-Wei Yang , Ting-Ya Lo , Chi-Lin Teng , Hsiao-Kang Chang , Shau-Lin Shue
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik LLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L23/532

Abstract:
The present disclosure relates an integrated chip. The integrated chip may include a first interconnect and a second interconnect disposed within a first inter-level dielectric (ILD) layer over a substrate. A lower etch stop structure is disposed on the first ILD layer and a third interconnect is disposed within a second ILD layer that is over the first ILD layer. The third interconnect extends through the lower etch stop structure to contact the first interconnect. An interconnect patterning layer is disposed on the second interconnect and laterally adjacent to the lower etch stop structure.
Public/Granted literature
- US20220157711A1 INTERCONNECT STRUCTURE Public/Granted day:2022-05-19
Information query
IPC分类: