Invention Grant
- Patent Title: Semiconductor memory device and method of manufacturing the semiconductor memory device
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Application No.: US17081616Application Date: 2020-10-27
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Publication No.: US11538830B2Publication Date: 2022-12-27
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2020-0076050 20200622
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/311 ; H01L27/1157

Abstract:
Provided herein may be a semiconductor memory device and a method of manufacturing the same. The semiconductor memory device may include a stacked body including alternately stacked interlayer insulating layers and conductive patterns, and channel structures penetrating the stacked body. Each of the channel structures may include a channel layer vertically extending up to the height of the upper portion of at least one upper conductive pattern disposed uppermost, among the conductive patterns, a memory layer surrounding the channel layer and extending from the lower interlayer insulating layer to the height of the middle portion of the upper conductive pattern, and a doped semiconductor pattern disposed above the channel layer and the memory layer.
Public/Granted literature
- US20210399007A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-12-23
Information query
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