Invention Grant
- Patent Title: SOI semiconductor structure and method for manufacturing an SOI semiconductor structure
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Application No.: US17395536Application Date: 2021-08-06
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Publication No.: US11538855B2Publication Date: 2022-12-27
- Inventor: Christian Sander , Martin Cornils
- Applicant: TDK-Micronas GmbH
- Applicant Address: DE Freiburg
- Assignee: TDK-Micronas GmbH
- Current Assignee: TDK-Micronas GmbH
- Current Assignee Address: DE Freiburg
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: DE102018009110.5 20181121
- Main IPC: H01L43/14
- IPC: H01L43/14 ; H01L27/22 ; H01L21/762 ; H01L27/12 ; H01L43/04 ; H01L43/06

Abstract:
An SOI semiconductor structure, including a substrate layer formed on a back side and a semiconductor layer of a second conductivity type formed on a front side, an insulating layer being disposed between the substrate layer and the semiconductor layer, a three-dimensional Hall sensor structure having a sensor region made up of a monolithic semiconductor body being formed in the semiconductor layer, and the semiconductor body extending from an underside up to the front side, at least three first metallic terminal contacts being formed on the upper side, and at least three second metallic terminal contacts being formed on the underside, the first terminal contacts being offset with respect to the second terminal contacts in a projection perpendicular to the front side, each first terminal contact and each second terminal contact being formed in each case on a highly doped semiconductor contact region of a second conductivity type.
Public/Granted literature
- US20210366984A1 SOI SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING AN SOI SEMICONDUCTOR STRUCTURE Public/Granted day:2021-11-25
Information query
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